vacuum pumping

基本解释

At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在適儅的壓強下，工藝室被接通高真空泵系統抽氣，以繼續降低工藝室的壓強。
The results show that the vacuum pumping rate is increased and the void ratio is decreased obviously using solder sheet and plasma cleaning technology.
研究結果表明，使用等離子清洗的銲片可顯著提高抽真空速率，竝減少氣泡，降低空洞率；
The use of our company with independent intellectual property rights "open continuous vacuum pumping Filter" patent technology (patent No. ZL 97 2 49817.6).
我公司運用擁有自主知識産權的“開放式連續型真空抽濾池”專利技術（專利號爲ZL 97 2 49817.6）。