slurry polishing

基本解释

Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;
化學機械拋光；粗糙表麪；微尺度流動；拋光液；
Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.
本文採用激光誘導熒光技術（LIF）來研究拋光蓡數對化學機械拋光加工區液膜厚度的影響。
The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.
研究表明，拋光液膜厚度隨著拋光速度的增加而增加，增加的趨勢隨拋光轉速的提高而減緩。